6D nanopositioning systems

Air bearings are a crucial component in ultra-precise motion control systems, offering frictionless operation by suspending components on a thin film of air. This eliminates mechanical contact, reducing wear and vibration while achieving unparalleled accuracy and smooth motion. They are essential in industries like semiconductor manufacturing, metrology, and photonics, where even minute inaccuracies can lead to significant issues.

ALIO‘s air bearing stages, such as their planar XY, linear X, and rotational air bearing systems, are designed to deliver exceptional precision and repeatability, down to nanometre-level accuracy. These systems are built to handle demanding applications, offering high payload capacities, smooth motion over long travel distances, and high-speed capabilities without compromising precision.

ALIO’s Nano Z stages use dual voice coil motors and air bearings to overcome limitations in vertical motion, providing exceptional stability and accuracy in the Z-axis. This design is particularly beneficial in applications like wafer inspection and photonics, where vertical precision is critical.