Confocal distance and thickness measurement sensors withstand temperatures up to 200 °C and are vacuum-compatible

Precision sensor supplier Micro-Epsilon has extended its range of confocal chromatic distance and thickness measurement sensors with a new High Temperature (HT) series of sensors that withstand operating temperatures up to 200 °C and are suitable for use in ultra-high vacuums and clean rooms.

Due to their compact, robust design and various measuring range options, the confocalDT IFS2047-xHT/VAC series of high precision confocal stainless steel sensors are ideal for measurement tasks in very limited installation spaces. The installation space depth can be further reduced by using the optional 90-degree beam path version. This gives flexibility in sensor mounting for different installation scenarios.

The HT sensors can also be used in clean rooms and ultra-high vacuums (UHV). Due to their passive component design, the sensors do not emit any heat radiation into the environment. In addition, an adhesive-free design keeps outgassing to a minimum. Primary fields of application therefore include electronics, semiconductor, glass, medical technology and precision machine building.

Reflective and diffuse surfaces

The confocalDT IFS2047-xHT/VAC is available in three measuring ranges of 0.8 mm, 2 mm and 4 mm. The sensors can be used for high precision displacement and distance measurements on strongly reflective and diffuse surfaces, as well as for thickness measurements. Due to their excellent linearity (max. < ±0.18 µm for distance and < ±0.36 µm for thickness measurements), resolution (max. < 6 nm) and thermal stability (from < 0.005 % FSO/K), the sensors also provide high repeatability.

All confocalDT sensors are compatible with the IFC Confocal controllers and vacuum accessories from Micro-Epsilon. This enables measuring rates up to 30 kHz for fast and reliable process monitoring.